Our electron microscopy lab offers high-quality imaging. Different microscopes for different purpose are available. A Hitachi S-3600 with variable pressure is used for common work and electron beam lithography. For high resolution imaging our Hitachi S-4800 is the best choice. This electron microscope is equipped with analysis tools like EDX, EBSD and STEM. The Zeiss DSM 962 has the function of a micromechanical testing lab. Specialized equipment allows us to perform micromechanical testing (indentation, tensile, compression) inside the scanning electron microscope. A special 3D backscatter detector allows us to get three dimensional images. Calculations like depth profil, volumes and more can be performed.
Contact: Gerhard Bürki, Johann Michler