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Documentation:

Continuum models of focused electron beam induced processing
Milos Toth, Charlene Lobo, Vinzenz Friedli, Aleksandra Szkudlarek and Ivo Utke

Beilstein J. Nanotechnol. 2015, 6, 1518-1540

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a) GIS simulator

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b) Single physisorbed gas species dimensionless FEBIP model for Gaussian Profile

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c) Single physisorbed gas species dimensionless FEBIP model for tophat Profile

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d) Two physisorbed gas species FEBIP model for exposure time dependence

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1) Single physisorbed gas species initial coverage calculator
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2) Single physisorbed gas species FEBIP model
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